Clean Gas Tetrafluoromethane

Clean Gas FC-14 (Clean Gas Tetrafluoromethane)

Properties and Classification

Appearance: Colorless and odorless gas UN Number: 1982
CAS Number: 75-73-0 Compressed gas

* Refer to MSDS for detailed information on the properties and safety of the product.

Specification

Purity vol% Min. 99.9997
O2+Ar volppm Max. 2.0
N2 volppm Max. 10
CH4 volppm Max. 0.5
CO volppm Max. 0.5
CO2 volppm Max. 0.7
H2O volppm Max. 0.5
Acids as HF volppm Max. 0.1
SF6 volppm Max. 0.2
CHF3 volppm Max. 0.6
Other fluorocarbons volppm Max. 2.0

Cylinder

Item 10L cylinder 47L cylinder
Size Inside diameter 140mm 232mm
Height (to the neck portion) 850mm 1370mm
Height (with a protective cap) * 1000mm 1520mm
Valve nozzle height (center) * 875mm 1380mm
Loading weight 7kg 30kg, 33kg
Material Manganese steel

* Estimated values for when a standard valve is mounted on a standard cylinder. The accuracy of these values is not guaranteed.

Valve

Nozzle size Ø22mm×14 right-hand threads
Material SUS316L

Physical & Chemical Properties

Item Unit Data
Chemical formula   CF4
Molecular weight   88.01
Boiling point °C -128.0
Melting point °C -184
Specific gravity (air: 1)   3.04
Liquid density kg/L 1.663
Gas density (127.9ßÜC, saturated liquid) g/L 7.666
Critical temperature °C -45.55
Critical pressure MPa 3.74
kg/cm2 38.1
Flammability Not applicable
Toxicity   Not applicable
Latent heat of vaporization (0°C, 1013MPa) kJ/kg 135.9
Maximum permissible concentration (ACGIH) ppm -
Explosive limit (in air)   -

Temperature - Vapor Pressure Curve

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