High-Purity Boron Trichloride (BCl3)​

About the product

Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is particularly suitable for etching metals and chosen for gate etching of leading-edge logic semiconductors.

三塩化ホウ素(BCl3)

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Merits

  • Boasts one of the industry’s largest production volumes and a stable supply structure supported by a strong supply chain.​
  • Stable product quality with the technique for packaging corrosive gas.
  • Proven sales track record with semiconductor makers.
  • High-quality technical support based on extensive marketing experience.​

Characteristics​

Technical Data

Appearance, odor / colorless odorless gas or liquid​ Liquefied gas
CAS NO / 10294-34-5 Toxic
UN number / 1741 -
  • Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data

Physical&Chemical Properties of BCl3

Item Data
Physical state Gas
Appearance Liquefied gas
Color Clear and colorless
Odor Pungent odor
pH Not applicable
Melting point -107.3℃
Boiling point 12.5℃
Flash point Non-flammable
Vapor pressure 132 kPa (20℃)
Relative density 4.07 atmosphere (air = 1)
Density

Liquid (water = 1) 1.434 (0℃)
      1.35 (11℃)​

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