High-Purity Nitrous Oxide (N2O)

About the product

Resonac’s high-purity gas used for deposition of insulating films in semiconductor manufacturing, and particularly suitable for forming oxide films.

亜酸化窒素(N2O)

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Merits

  • Used to form various types of oxide films.
  • A stable supply structure supported by a strong supply chain from multiple production sites.
  • Proven sales track record with semiconductor makers.
  • High-quality technical support based on extensive marketing experience.
  • Available in a variety of packaging modes from 47L cylinders to large containers (ISO tube containers).

Characteristics

Technical Data

Appearance / colorless gas or liquid UN number
/1070 (compressed gas)
/2201 (liquefied gas)
CAS NO/10024-97-2 Sweet smell
  • Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.

Physical & Chemical Properties of N2O

Item Data
Physical state Gas
Appearance Liquefied gas
Color Colorless gas at room temperature
Odor Odorless or slightly sweet odor
pH Not applicable
Melting point -90.85 ℃ (87.8kPa)
Boiling point -88.47 ℃ (101.3kPa)
Flash point Enhances the combustion of other substances
Vapor pressure 87.8kPa(-90.8℃) 5.15MPa(20℃) 7.26MPa(36.5℃ = critical temperature)
Relative vapor density (20℃) 1.53 (air = 1)
Relative density

Liquid density: 1.226kg/l (boiling point) 

Gas density: 1.977kg/m3 (0℃,101.3kPa)

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