High-Purity FC-14 (CF4)
About the product
Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing, and particularly suitable for etching oxide films.
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Merits
- Applicable to various types of oxide films.
- Boasts one of the industry’s largest production volumes and a stable supply structure supported by a strong supply chain.
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
- Available in a variety of packaging modes from 47L cylinders to large containers (ISO tube trailers).
Characteristics
Technical Data
Appearance, odor / colorless odorless gas | Appearance, odor / colorless odorless gas |
CAS NO/75-73-0 | Compressed gas |
- ※ Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.
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Physical & Chemical Properties of CF4
Item Data Physical state Gas Appearance Liquefied gas Color Colorless pH Not applicable Melting point -184 ℃ Boiling point -127.9 ℃ (101.3kPa) Flash point Incombustible Critical temperature -45.5 ℃ Vapor pressure 3.6MPa (-45.6℃) Critical pressure 3743 kPa Relative vapor density (20℃) 3.72kg/m3 (101.3kPa, 15℃) Relative density 2.07 (air = 1、21℃)
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