Acid Gas Abatement Systems​

Clean-S Z Series

About the product

Resonac’s exhaust gas treatment equipment “Clean-S Z Series” can discharge toxic acid gases produced in the dry etching process of aluminium (Al), polycrystalline silicon (poly-Si), and silicon dioxide (SiO2) films in semiconductor manufacturing as safe and clean gases. ​
In 1985, Resonac was the first company to develop and market acid gas abatement systems, and has delivered 7,000 detoxifying cylinders and more than 1,000 storage units. ​
 

 

除害筒収納BOX

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Merits

  • A wide-ranging product lineup for selecting the optimal detoxifying cylinders based on gas recipes.​
  • Enables the detection of abnormalities and breakthroughs and the development of safe detoxifying cylinder replacement systems by adopting an equipment control system.​
  • A stable supply of detoxifying cylinders to various areas through Resonac’s regular transportation services for gas cylinders and other items.​

Characteristics​

Gas adsorption capacity​

Gas​ Clean-S ZB​ Clean-S ZH​ Clean-S ZT​ Clean-S B2​ Clean-S NX-II​
Type 13​ Type 13​ Type 13​ Type 13​ Type 13​
[kg] [kg] [kg] [kg] [kg]
Cl2 11.1 3.1 3.9 14.1 8.2
BCl3 15.6 16.7 8.4 15.6 4.2
SiF4 6.6 22.9 11.4 7.7 19.2
HF 4.7 13.2 6.6 2.4 8.4
HCl 9.3 24.1 12.0 5.1 15.3
HBr 27.2 53.5 26.7 9.8 34.0
SO2 4.8 2.8 11.9 3.9 12.2
Features​

Physical adsorption of activated carbons + chemicaladsorption of inorganic agents​

Chemical adsorption of inorganic agents​ Chemical adsorption of inorganic agents​ Physical adsorption of activated carbons + chemicaladsorption of inorganic agents​ Chemical adsorption of inorganic agents​
Suitable for removing Cl​ Suitable for removing HBr, HF, SiF4​ Suitable for removing SO2 (process using SF6)​ Suitable for removing Cl​ Suitable for removing SO2 (process using SF6)​

<Measurement conditions> ​
Temperature = 25℃, pressure = normal pressure, flow rate (linear velocity (LV)) = 2 m/min, gas concentration = 10,000 ppm (= 1%, N2 dilution) ​

*The data are representative values and do not guarantee quality.​

 

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