Electronic Chemicals Department

Specialty Gases Group 5-1, Ogimachi, Kawasaki-ku, Kawasaki, KANAGAWA 210-0867 TEL : 81-44-329-0764 FAX : 81-44-329-0781 Major Product/Service High-purity FC-14 High-purity HFC-23 High-purity HFC-32 High-purity FC-116 High-purity FC-C318 High-purity boron trichloride High-purity chlorine High-purity hydrogen bromide High-purity sulfur hexafluoride High-purity nitrogen trifluoride High-purity ammonia High-purity nitrogen monoxide High-purity HFC-41 High-purity FC-218 High-purity FC-2316 High-purity tantalum pentaethoxide High-purity nitrogen monoxide (for electronic materials) Medical System Team Major Product/Service Nitrogen/JP (laughing gas) Anesoxyn™ (inhaled painkiller) Anesclean™ (system for treating excess anesthetic gas)

Specialty Gas Equipment Group 5-1, Ogimachi, Kawasaki-ku, Kawasaki, KANAGAWA 210-0867 TEL : 81-44-329-0766 FAX : 81-44-329-0781 Major Product/Service Treatment equipment for acid gases discharged from the dry etching process Treatment equipment for global-warming PFC emissions discharged from the dry etching process Erosion/wear resistance surface treatment Leak detectors Fluorine/Chlorine resistance bellows seal valves Ozone depleting gas scrubber SOLFINE™ Group 4980, Kaisei-cho, Shunan, YAMAGUCHI 746-0006 TEL : 81-834-64-0806 FAX : 81-834-62-0997 Major Product/Service High-purity solvents for the electronics industry Solvents for liquid crystals Solvents for electronic devices Solvents for photo resists Solvents for printed circuit boards Resist strippers SWP removing agents Selective Etching Solution

Operation · R&D Site

Kawasaki Plant
Tokuyama Plant