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Electronics

Plant Growth Facilities

SiC epitaxial wafer SiC epitaxial wafer

Alias name: SiC epitaxial wafer
Application: Power device application

Inquiry

Marketing Department, Device Solutions Division
TEL ：+81-494-23-6127
FAX ：+81-494-25-0830

Poly-N-vinylacetamide N-vinylacetamide homopolymer

Alias name: Poly-N-vinylacetamide
Application: Binder, Dispersing agent Adhesive

Inquiry

Specialty Chemicals Department, Functional Chemicals Division
TEL ：+81-3-6402-5090
FAX ：+81-3-5403-5730

VGCF™-H vapor grown carbon fiber

Application: Conducting addive for cathode and anode of lithium ion battery

Inquiry

Showa Denko Packaging Co.,Ltd.
TEL ：
FAX ：

HFC-23 tetrafluoromethane

Application: etching, Chamber cleaning

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

FC-116 hexafluoroethane

Application: etching, Chamber cleaning

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

FC-14 trifluoromethane

Application: etching, Chamber cleaning

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

HFC-32 difluoromethane

Application: etching, Chamber cleaning

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

FC-C318 octafluorocyclobutane

Application: etching, Chamber cleaning

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

FC-218 octafluoropropane

Application: etching, Chamber cleaning

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

FC-2316 hexafluoro-1,3-butadiene

Application: etching, Chamber cleaning

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

boron trichloride BCl3

Application: etching, Chamber cleaning

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

chlorine Cl2

Application: etching, Chamber cleaning

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

hydrogen bromide HBr

Application: etching, Chamber cleaning

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

sulfur hexafluoride SF6

Application: etching, Chamber cleaning

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

ammonia NH3

Application: Deposition

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

nitrous oxide N2O

Application: Deposition

Inquiry

Electronic Chemicals Division, Specialty Gases Group
TEL ：81-44-329-0764
FAX ：81-44-329-0781

Clean-S PF PFC removal equipment by Chemical Capture System

Application: Removal of PFCs from off gas after semiconductor dry etching processes.

Inquiry

Electronic Chemicals Division, Specialty Gas Equipment Group
TEL ：81-44-520-1364
FAX ：81-44-520-1366

HICDS PFC removal equipment by Catalytic Decomposition System

Application: Removal of PFCs from off gas after semiconductor dry etching processes.

Inquiry

Electronic Chemicals Division, Specialty Gas Equipment Group
TEL ：81-44-520-1364
FAX ：81-44-520-1366

CleanS-Z Dry-etching gas removal equipment

Application: Removes of dry etching waste gas (Cl2, HBr, BCl3, SiF4 ...etc.)

Inquiry

Electronic Chemicals Division, Specialty Gas Equipment Group
TEL ：81-44-520-1364
FAX ：81-44-520-1366

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