HFC-23

Alias name
  • tetrafluoromethane
  • CHF3
  • tetrafluoromethane <ChemicalName>
The inquiry form is here.
Inquiry of this product
Electronic Chemicals Division, Specialty Gases Group

About the product

A high quality gas for semiconductor raw material, used for etching and cleaning.

Inquiry of this product
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781

The data shown below are representative figures. They are not guaranteed values.