HFC-23
- Alias name
- tetrafluoromethane
- CHF3
- tetrafluoromethane <ChemicalName>
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Inquiry of this product
Electronic Chemicals Division, Specialty Gases Group
About the product
A high quality gas for semiconductor raw material, used for etching and cleaning.
Inquiry of this product
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
TEL :81-44-329-0764
FAX :81-44-329-0781
The data shown below are representative figures. They are not guaranteed values.