High-Purity FC-218 (C3F8)
About the product
Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing, and particularly suitable for etching oxide films.
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Merits
- Used for etching various types of oxide films.
- A stable supply structure supported by a strong supply chain.
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
Characteristics
Technical Data
Appearance / colorless gas | Odor / odorless |
CAS NO/76-19-7 | UN number / 2424 |
High-pressure gas, liquefied gas | Incombustible |
- ※ Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.
Physical & Chemical Properties of C3F8
Item | Data |
---|---|
Physical state | Gas |
Appearance | Liquefied gas |
Color | Colorless |
Odor | Ether odor |
pH | Not applicable |
Melting point | -183.0 ℃ |
Boiling point | -36.7 ℃ |
Flash point | Non-flammable |
Autoignition point | Incombustible |
Vapor pressure | 0.788 MPa (21.1 ℃) |
Relative vapor density (20℃) | 6.5 (air = 1) |
Relative density | 1.35 (20℃) |
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