High-Purity Ammonia (NH3)
About the product
Resonac’s high-purity gas used for the deposition of insulating films in semiconductor manufacturing, and particularly suitable for forming nitride films.
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Merits
- Used to form various types of nitride films.
- A stable supply structure supported by a strong supply chain from multiple production sites.
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
- Available in a variety of packaging modes from 47L cylinders to large containers (ISO tank containers).
Characteristics
Technical Data
| Appearance / colorless gas or liquid | Odor / pungent odor |
| CAS NO / 7664-41-7 | UN number / 1005 |
| Liquefied gas | Deleterious substance |
- ※ Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.
Physical & Chemical Properties of NH3
| Item | Data |
|---|---|
| Physical state | Gas |
| Appearance | Liquefied gas |
| Color | Clear and colorless |
| Odor | Ammonia odor |
| pH | Not applicable |
| Melting point | -77.7 ℃ |
| Boiling point | -33.4 ℃ |
| Autoignition point | 651 ℃ |
| Vapor pressure | 755 kPa (20 °C) |
| Relative vapor density (20℃) | 0.55 (air = 1) |
| Relative density | 0.61 (20 °C) |
| Explosive limits | 15 – 28 vol % (in air) |
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