High-Purity Ammonia (NH3)
About the product
Resonac’s high-purity gas used for the deposition of insulating films in semiconductor manufacturing, and particularly suitable for forming nitride films.
Inquiry of this product
Merits
- Used to form various types of nitride films.
- A stable supply structure supported by a strong supply chain from multiple production sites.
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
- Available in a variety of packaging modes from 47L cylinders to large containers (ISO tank containers).
Characteristics
Technical Data
Appearance / colorless gas or liquid | Odor / pungent odor |
CAS NO / 7664-41-7 | UN number / 1005 |
Liquefied gas | Deleterious substance |
- ※ Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.
Physical & Chemical Properties of NH3
Item | Data |
---|---|
Physical state | Gas |
Appearance | Liquefied gas |
Color | Clear and colorless |
Odor | Ammonia odor |
pH | Not applicable |
Melting point | -77.7 ℃ |
Boiling point | -33.4 ℃ |
Autoignition point | 651 ℃ |
Vapor pressure | 755 kPa (20 °C) |
Relative vapor density (20℃) | 0.55 (air = 1) |
Relative density | 0.61 (20 °C) |
Explosive limits | 15 – 28 vol % (in air) |
Inquiry of this product