Electronics : Waste gas treatment equipment
- Petrochemical Chemical
- Specialty chemical materials
- Functional Resin
- Electronics
- Carbon Products
- Ceramics Products
- Aluminum Products
- Others
- Functional monomers, Photoreactive / thermal reactive materials
- Industrial thickener
- A pharmaceutical (for external use) raw material, cosmetic raw material
- Drug additives/Amino acid
- Separation & refining materials
- Unsaturated polyester resin
- Vinyl ester resin
- Synthetic resin emulsions
- Resins for use as electronic materials
- Abrasive, super abrasive, tool, lapping and polishing materiail
- Refractory, special refractory, almumina filler
- Filler for electoronic materials
- Lubrication and mold-release agents
- Clean-S PFPFC removal equipment by Chemical Capture System
- Application
- Removal of PFCs from off gas after semiconductor dry etching processes.
InquiryElectronic Chemicals Division, Specialty Gas Equipment Group
TEL ：81-44-520-1364
FAX ：81-44-520-1366
- HICDSPFC removal equipment by Catalytic Decomposition System
- Application
- Removal of PFCs from off gas after semiconductor dry etching processes.
InquiryElectronic Chemicals Division, Specialty Gas Equipment Group
TEL ：81-44-520-1364
FAX ：81-44-520-1366
- CleanS-ZDry-etching gas removal equipment
- Application
- Removes of dry etching waste gas (Cl2, HBr, BCl3, SiF4 ...etc.)
InquiryElectronic Chemicals Division, Specialty Gas Equipment Group
TEL ：81-44-520-1364
FAX ：81-44-520-1366
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