Electronics : Waste gas treatment equipment

Clean-S PF
PFC removal equipment by Chemical Capture System
Application
Removal of PFCs from off gas after semiconductor dry etching processes.
Inquiry
Electronic Chemicals Division, Specialty Gas Equipment Group
TEL :81-44-520-1364
FAX :81-44-520-1366
HICDS
PFC removal equipment by Catalytic Decomposition System
Application
Removal of PFCs from off gas after semiconductor dry etching processes.
Inquiry
Electronic Chemicals Division, Specialty Gas Equipment Group
TEL :81-44-520-1364
FAX :81-44-520-1366
CleanS-Z
Dry-etching gas removal equipment
Application
Removes of dry etching waste gas (Cl2, HBr, BCl3, SiF4 ...etc.)
Inquiry
Electronic Chemicals Division, Specialty Gas Equipment Group
TEL :81-44-520-1364
FAX :81-44-520-1366
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