Clean-S PF

Alias name
  • PFC removal equipment by Chemical Capture System
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Inquiry of this product
Electronic Chemicals Division, Specialty Gas Equipment Group

About the product

By applying Chemical Capture System, decomposing PFCs with high efficiency is possible without water.

Since the PFCs decomposition temperature is relatively low such as 600℃, it helps to save energy.

Inquiry of this product
Electronic Chemicals Division, Specialty Gas Equipment Group
TEL :81-44-520-1364
FAX :81-44-520-1366

The data shown below are representative figures. They are not guaranteed values.