HICDS

Alias name
  • PFC removal equipment by Catalytic Decomposition System
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Inquiry of this product
Electronic Chemicals Division, Specialty Gas Equipment Group

About the product

Enable removal of PFCs from off gas after semiconductor dry etching processes, with a high decomposition rate by catalytic decomposition system at 750℃.

We can provide the PFC removal equipment.

Inquiry of this product
Electronic Chemicals Division, Specialty Gas Equipment Group
TEL :81-44-520-1364
FAX :81-44-520-1366

The data shown below are representative figures. They are not guaranteed values.