CleanS-Z

Alias name
  • Dry-etching gas removal equipment
The inquiry form is here.
Inquiry of this product
Electronic Chemicals Division, Specialty Gas Equipment Group

About the product

This equipment removes dry etching waste gas by combination of physical absorption and chemical capture.

By choosing absorbing agents adequately, enable removal of the various gas types (Cl2, HBr, BCl3, SiF4 ...etc.), accordingly.

Inquiry of this product
Electronic Chemicals Division, Specialty Gas Equipment Group
TEL :81-44-520-1364
FAX :81-44-520-1366

The data shown below are representative figures. They are not guaranteed values.