Electronic Chemicals Division

Electronics

FC-116
hexafluoroethane
Application
Etching gas, Cleaning gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
HFC-23
tetrafluoromethane
Application
Etching gas, Cleaning gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
FC-218
octafluoropropane
Application
Etching gas, Cleaning gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
FC-2316
hexafluoro-1,3-butadiene
Application
Etching gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
FC-C318
octafluorocyclobutane
Application
Etching gas, Cleaning gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
FC-14
trifluoromethane
Application
Etching gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
HFC-32
difluoromethane
Application
Etching gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
ammonia
NH3
Application
Etching gas, Cleaning gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
nitrous oxide
N2O
Application
Deposition gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
chlorine
Cl2
Application
Etching gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
boron trichloride
BCl3
Application
Etching gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
hydrogen bromide
HBr
Application
Etching gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
sulfur hexafluoride
SF6
Application
Etching gas, Cleaning gas
Inquiry
Electronic Chemicals Division, Specialty Gases Group
TEL :81-44-329-0764
FAX :81-44-329-0781
Clean-S PF
PFC removal equipment by Chemical Capture System
Application
Removal of PFCs from off gas after semiconductor dry etching processes.
Inquiry
Electronic Chemicals Division, Specialty Gas Equipment Group
TEL :81-44-520-1364
FAX :81-44-520-1366
HICDS
PFC removal equipment by Catalytic Decomposition System
Application
Removal of PFCs from off gas after semiconductor dry etching processes.
Inquiry
Electronic Chemicals Division, Specialty Gas Equipment Group
TEL :81-44-520-1364
FAX :81-44-520-1366
CleanS-Z
Dry-etching gas removal equipment
Application
Removes of dry etching waste gas (Cl2, HBr, BCl3, SiF4 ...etc.)
Inquiry
Electronic Chemicals Division, Specialty Gas Equipment Group
TEL :81-44-520-1364
FAX :81-44-520-1366
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